Concepedia

Minoru Hanazaki

MH

4

Publications

101

Citations

4

H-Index

1990

Active since

Affiliations

Mitsubishi Electric (Japan)(Current)

Minoru Hanazaki is an author at Mitsubishi Electric (Japan) specializing in plasma physics, applied physics, and engineering.

Top concepts

Publications per year

1990–2000

4

Publications

4

Platinum Etching and Plasma Characteristics in RF Magnetron and Electron Cyclotron Resonance Plasmas

Kazuyasu Nishikawa, Yoshihiro Kusumi, Tatsuo Oomori et al. · Japanese Journal of Applied Physics · 1993 · 34 citations

, , +16

Large-diameter microwave plasma source excited by azimuthally symmetric surface waves

Mutumi Tuda, Kouichi Ono, Hiroki Ootera et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 29 citations

, , +17

Effects of O<sub>2</sub> Addition on BCl<sub>3</sub>/Cl<sub>2</sub> Plasma Chemistry for Al Etching

Toshinobu Banjo, Masaaki Tsuchihashi, Minoru Hanazaki et al. · Japanese Journal of Applied Physics · 1997 · 27 citations

, , +11

Plasma Chemical View of Magnetron and Reactive Ion Etching of Si with Cl<sub>2</sub>

Kouichi Ono, Tatsuo Oomori, Minoru Hanazaki · Japanese Journal of Applied Physics · 1990 · 11 citations

, , +17

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