Concepedia

Minoru Hanazaki

MH

Statistics

Publications

4

Citations

101

H-Index

4

Active since

1990

Affiliations

Mitsubishi Electric (Japan)(Current)

Minoru Hanazaki is an author at Mitsubishi Electric (Japan) specializing in plasma physics, applied physics, and engineering.

Top concepts

EngineeringPlasma PhysicsApplied PhysicsPhysicsMaterial SciencePlasma ConfinementSurface ScienceMass SpectrometryMagnetohydrodynamicsElectrical Engineering

Publications per year

1990–2000

4

Publications

4

Platinum Etching and Plasma Characteristics in RF Magnetron and Electron Cyclotron Resonance Plasmas

Kazuyasu Nishikawa, Yoshihiro Kusumi, Tatsuo Oomori et al. · Japanese Journal of Applied Physics · 1993 · 34 citations

Engineering, Platinum Etching, Plasma Physics +16

Large-diameter microwave plasma source excited by azimuthally symmetric surface waves

Mutumi Tuda, Kouichi Ono, Hiroki Ootera et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 29 citations

Engineering, Plasma Science, Plasma Physics +17

Effects of O<sub>2</sub> Addition on BCl<sub>3</sub>/Cl<sub>2</sub> Plasma Chemistry for Al Etching

Toshinobu Banjo, Masaaki Tsuchihashi, Minoru Hanazaki et al. · Japanese Journal of Applied Physics · 1997 · 27 citations

Materials Engineering, Materials Science, Plasma Electronics +11

Plasma Chemical View of Magnetron and Reactive Ion Etching of Si with Cl<sub>2</sub>

Kouichi Ono, Tatsuo Oomori, Minoru Hanazaki · Japanese Journal of Applied Physics · 1990 · 11 citations

Engineering, Plasma Physics, Reactive Ion Etching +17

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