Concepedia

Kazuyasu Nishikawa

KN

9

Publications

273

Citations

9

H-Index

1991

Active since

Affiliations

Mitsubishi Electric (Japan)(Current)

Kazuyasu Nishikawa is an author at Mitsubishi Electric (Japan) specializing in applied physics, engineering, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial SciencePhysicsSpectroscopyMicroelectronicsNatural SciencesChemical EngineeringChemistry

Publications per year

1991–2023

9

Publications

9

Numerical study of the etch anisotropy in low-pressure, high-density plasma etching

Mutumi Tuda, Kazuyasu Nishikawa, Kouichi Ono · Journal of Applied Physics · 1997 · 78 citations

Engineering, Etch Anisotropy, Vacuum Device +17

Effects of etch products and surface oxidation on profile evolution during electron cyclotron resonance plasma etching of poly-Si

Mutumi Tuda, Kouichi Ono, Kazuyasu Nishikawa · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 51 citations

Engineering, Electron-beam Lithography, Electron Cyclotron Resonance +16

Chemical Kinetics of Chlorine in Electron Cyclotron Resonance Plasma Etching of Si

Kouichi Ono, Mutumi Tuda, Kazuyasu Nishikawa et al. · Japanese Journal of Applied Physics · 1994 · 38 citations

Chemical Engineering, Optical Materials, Engineering +15

Platinum Etching and Plasma Characteristics in RF Magnetron and Electron Cyclotron Resonance Plasmas

Kazuyasu Nishikawa, Yoshihiro Kusumi, Tatsuo Oomori et al. · Japanese Journal of Applied Physics · 1993 · 34 citations

Engineering, Platinum Etching, Plasma Physics +16

\bfiIn situ Monitoring of Product Species in Plasma Etching by Fourier Transform Infrared Absorption Spectroscopy

Kazuyasu Nishikawa, Kouichi Ono Kouichi Ono, Mutumi Tuda et al. · Japanese Journal of Applied Physics · 1995 · 18 citations

Engineering, Absorption Spectroscopy, Vacuum Device +19

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