Concepedia

Yoshihiro Kusumi

YK

2

Publications

44

Citations

2

H-Index

1993

Active since

Affiliations

Mitsubishi Electric (Japan)(Current)

Yoshihiro Kusumi is an author at Mitsubishi Electric (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsCorrosionPulse PowerMicrostructurePlasma PhysicsSurface ScienceMicroelectronics

Publications per year

1993–1995

2

Publications

2

Platinum Etching and Plasma Characteristics in RF Magnetron and Electron Cyclotron Resonance Plasmas

Kazuyasu Nishikawa, Yoshihiro Kusumi, Tatsuo Oomori et al. · Japanese Journal of Applied Physics · 1993 · 34 citations

Engineering, Platinum Etching, Plasma Physics +16

Effect of N<sub>2</sub> Addition on Aluminum Alloy Etching by Electron Cyclotron Resonance Reactive Ion Etching and Magnetically Enhanced Reactive Ion Etching

Yoshihiro Kusumi, Nobuo Fujiwara, Junko Matsumoto et al. · Japanese Journal of Applied Physics · 1995 · 10 citations

Materials Science, Materials Engineering, Corrosion Protection +12

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