Concepedia

Masaaki Tsuchihashi

MT

2

Publications

56

Citations

2

H-Index

1997

Active since

Affiliations

Mitsubishi Electric (Japan)(Current)

Masaaki Tsuchihashi is an author at Mitsubishi Electric (Japan) specializing in plasma physics, engineering, and applied physics.

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Publications per year

1997–2000

2

Publications

2

Large-diameter microwave plasma source excited by azimuthally symmetric surface waves

Mutumi Tuda, Kouichi Ono, Hiroki Ootera et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 29 citations

, , +17

Effects of O<sub>2</sub> Addition on BCl<sub>3</sub>/Cl<sub>2</sub> Plasma Chemistry for Al Etching

Toshinobu Banjo, Masaaki Tsuchihashi, Minoru Hanazaki et al. · Japanese Journal of Applied Physics · 1997 · 27 citations

, , +11

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