Concepedia

Toshinobu Banjo

TB

2

Publications

72

Citations

2

H-Index

1994

Active since

Affiliations

Mitsubishi Electric (Germany)(Current)

Toshinobu Banjo is an author at Mitsubishi Electric (Germany) specializing in engineering, applied physics, and plasma physics.

Top concepts

EngineeringPlasma PhysicsApplied PhysicsPhysicsChemistryPlasma ScienceNanoelectronicsSurface ScienceMaterial ScienceMicroelectronics

Publications per year

1994–1997

2

Publications

2

Effect Plasma Transport on Etched Profiles with Surface Topography in Diverging Field Electron Cyclotron Resonance Plasma

Nobuo Fujiwara, Takahiro Maruyama, Masahiro Yoneda et al. · Japanese Journal of Applied Physics · 1994 · 45 citations

Engineering, Electron-beam Lithography, Plasma Science +18

Effects of O<sub>2</sub> Addition on BCl<sub>3</sub>/Cl<sub>2</sub> Plasma Chemistry for Al Etching

Toshinobu Banjo, Masaaki Tsuchihashi, Minoru Hanazaki et al. · Japanese Journal of Applied Physics · 1997 · 27 citations

Materials Engineering, Materials Science, Plasma Electronics +11

Rows per page

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