Shigeru Tahara

Advances in directed self assembly integration and manufacturability at 300 mm

Benjamen M. Rathsack, Mark Somervell, Makato Muramatsu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Engineering, Manufacturing Engineering, Materials Engineering +15

STT MRAM patterning challenges

Werner Boullart, D. Radisic, Vasile Paraschiv et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

Progress in directed self-assembly hole shrink applications

Todd R. Younkin, Roel Gronheid, Paulina Rincon Delgadillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +16

28 nm pitch of line/space pattern transfer into silicon substrates with chemo-epitaxy Directed Self-Assembly (DSA) process flow

Boon Teik Chan, Shigeru Tahara, Doni Parnell et al. · Microelectronic Engineering · 2014 · 17 citations

Engineering, Materials Engineering, Materials Science +17