Concepedia

Heterometallic Ti-Zr oxo nanocluster photoresists for advanced lithography

Yang Qiao, Guangyue Shi, Ou Zhang, Michaela Vockenhuber, Yasin Ekinci, Feng Luo, Lei Zhang

Science China Materials · 2024 · 26 citations · 45 references

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45

Lithography gets extreme

Christian Wagner, Noreen Harned · Nature Photonics · 2009 · 623 citations

Self‐Powered MXene/GaN van der Waals Heterojunction Ultraviolet Photodiodes with Superhigh Efficiency and Stable Current Outputs

Weidong Song, Jiaxin Chen, Ziliang Li et al. · Advanced Materials · 2021 · 492 citations

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Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks

Min Tu, Benzheng Xia, Dmitry E. Kravchenko et al. · Nature Materials · 2020 · 198 citations · Full text

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Nanofabrication for all-soft and high-density electronic devices based on liquid metal

Min‐gu Kim, Devin K. Brown, Oliver Brand · Nature Communications · 2020 · 182 citations · Full text

, , +17

Metal–Organic Framework-Inspired Metal-Containing Clusters for High-Resolution Patterning

Hong Xu, Kazunori Sakai, Kazuki Kasahara et al. · Chemistry of Materials · 2018 · 126 citations

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