Concepedia

Digital Lithography

Digital Lithography is a digital printmaking technique that belongs to the class of planographic printing methods, distinguished by its use of digitally generated image data to create lithographic prints without the need for traditional hand-drawn or photographic plates.

366

Publications

11.8K

Citations

1.4K

Authors

354

Institutions

Publications per year

2017–2026

67

Parents

Publications

366

Advanced scanning probe lithography

Ricardo Garcı́a, Armin W. Knoll, Elisa Riedo · Nature Nanotechnology · 2014 · 655 citations · Full text

, , +7

Directed Self-Assembly of Block Copolymers for Nanolithography: Fabrication of Isolated Features and Essential Integrated Circuit Geometries

Mark P. Stoykovich, Huiman Kang, Kostas Ch. Daoulas et al. · ACS Nano · 2007 · 439 citations

, , +17

Directed self-assembly of block copolymers for next generation nanolithography

Seong‐Jun Jeong, Ju Young Kim, Bong Hoon Kim et al. · Materials Today · 2013 · 297 citations · Full text

, , +17

Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics

Eberhard Backer, W. Ehrfeld, D. Münchmeyer et al. · Die Naturwissenschaften · 1982 · 200 citations

, , +10

Polymers in conventional and alternative lithography for the fabrication of nanostructures

Canet Acikgöz, Mark A. Hempenius, Jurriaan Huskens et al. · European Polymer Journal · 2011 · 193 citations · Full text

, , +15

1–5 of 366

Authors

1.4K

  1. DZ
    David Z. Pan

    The University of Texas at Austin, United States

    12 publications · 407 citations

    11

    h-index

  2. BY
    Bei Yu

    Chinese University of Hong Kong, Hong Kong SAR China

    7 publications · 244 citations

    7

    h-index

  3. AB
    Andrew B. Kahng

    University of California San Diego, United States

    6 publications · 142 citations

    6

    h-index

  4. XM
    Xu Ma

    Beijing Institute of Technology, China

    6 publications · 132 citations

    6

    h-index

  5. JF
    Jo Finders

    ASML (Netherlands), Netherlands

    6 publications · 296 citations

    6

    h-index

1–5 of 1.4K

Institutions

354

  1. The University of Texas at Austin

    Austin, United States

    14 h-index

    64 publications

    1.9K citations

  2. ASML (Netherlands)

    Veldhoven, The Netherlands

    13 h-index

    104 publications

    5.1K citations

  3. IBM (United States)

    Armonk, United States

    13 h-index

    48 publications

    1.6K citations

  4. Fraunhofer Institute for Microengineering and Microsystems

    Mainz, Germany

    11 h-index

    37 publications

    1.1K citations

  5. Chinese Academy of Sciences

    Beijing, China

    10 h-index

    44 publications

    926 citations

  6. University of Wisconsin–Madison

    Madison, United States

    9 h-index

    26 publications

    3.1K citations

  7. Intel (United States)

    Santa Clara, United States

    8 h-index

    16 publications

    506 citations

  8. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    6 h-index

    10 publications

    227 citations

1–8 of 354

Venues

  1. 21

    h-index

  2. Microelectronic Engineering

    30 publications · 693 citations

    15

    h-index

  3. Microsystem Technologies

    15 publications · 279 citations

    11

    h-index

  4. Optics Express

    12 publications · 328 citations

    11

    h-index

  5. 11

    h-index

1–5