Applied Surface Science · 2023 · 33 citations · 63 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsAtomic Layer DepositionOxide SemiconductorsSemiconductor Device MaterialsSemiconductor HeterostructuresSemiconductor Thin FilmsThin-film MaterialsAtomic Layer Deposition PassivationAtomic Layer Deposition PrecursorsGallium OxideHeteroepitaxySemiconductor Oxide Thin FilmsThin Oxide FilmsThin Oxide Layers
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Projector augmented-wave method
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Natural Sciences, Chemistry, Physics +17
David G. Cahill, W. K. Ford, Kenneth E. Goodson et al. · Journal of Applied Physics · 2003 · 3.2K citations · Full text
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Natural Sciences, Materials Engineering, Materials Science +17