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Ultrathin GaN film and AlGaN/GaN heterostructure grown on thick AlN buffer by MOCVD

Materials EngineeringMaterials ScienceElectrical EngineeringWide-bandgap SemiconductorEngineeringAluminium NitrideApplied PhysicsAluminum Gallium NitrideGan Power DeviceThick Aln BufferUltrathin Gan Film