Selective etching of p-GaN over Al0.25Ga0.75N in Cl2/Ar/O2 ICP plasma for fabrication of normally-off GaN HEMTs

Andrzej Taube, Maciej Kamiński, Marek Ekielski, R. Kruszka, Joanna Jankowska‐Śliwińska, Paweł Piotr Michałowski, Joanna Zdunek, Anna Szerling

Materials Science in Semiconductor Processing · 2020 · 22 citations · 21 references

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