Materials Science in Semiconductor Processing · 2020 · 22 citations · 21 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsEtching ProcessesIii-v SemiconductorsSemiconductor Device MaterialsWide Band Gap SemiconductorsWide-bandgap Semiconductor DevicesWide-bandgap SemiconductorsDevice FabricationEtchingGallium NitrideGallium Nitride (Gan) MaterialsHeterostructure DevicesPlasma EtchingSelective Etching
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