High-dielectric-constant silicon nitride thin films fabricated by radio frequency sputtering in Ar and Ar/N2 gas mixture - Concepedia

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High-dielectric-constant silicon nitride thin films fabricated by radio frequency sputtering in Ar and Ar/N2 gas mixture

19

Citations

21

References

2020

Year

Chia‐Yueh Chou, Chia-Hua Lin, Wei-Hao Chen, Bao-Jhen Li, Cheng‐Yi Liu

Thin Solid Films

Materials ScienceEngineeringRadio FrequencyNanoelectronicsApplied PhysicsSemiconductor Device FabricationThin FilmsChemical Vapor DepositionMicroelectronicsHigh-dielectric-constant SiliconSilicon On InsulatorThin Film Processing

References

	Year	Citations

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