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Crystalline quality improvement of face-to-face annealed MOVPE-grown AlN on vicinal sapphire substrate with sputtered nucleation layer

Materials ScienceAluminium NitrideMaterial AnalysisEngineeringCrystal Growth TechnologySurface ScienceApplied PhysicsVicinal Sapphire SubstrateSputtered Nucleation LayerChemical Vapor DepositionCrystalline Quality Improvement