Concepedia

Speeding up the unique assets of atomic layer deposition

David Muñoz‐Rojas, Tony Maindron, A. Estève, Fabien Piallat, J.C.S. Kools, Jean-Manuel Decams

Materials Today Chemistry · 2019 · 101 citations · 150 references

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References

150

Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

Riikka L. Puurunen · Journal of Applied Physics · 2005 · 2.6K citations

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Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

Ville Miikkulainen, Markku Leskelä, Mikko Ritala et al. · Journal of Applied Physics · 2013 · 1.4K citations

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Atomic layer deposition (ALD): from precursors to thin film structures

Markku Leskelä, Mikko Ritala · Thin Solid Films · 2002 · 1.3K citations

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Degradation observations of encapsulated planar CH<sub>3</sub>NH<sub>3</sub>PbI<sub>3</sub> perovskite solar cells at high temperatures and humidity

Yu Han, S. Meyer, Yasmina Dkhissi et al. · Journal of Materials Chemistry A · 2015 · 990 citations

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Overview of atomic layer etching in the semiconductor industry

Keren J. Kanarik, Thorsten Lill, Eric A. Hudson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 604 citations · Full text

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