Fabien Piallat

Speeding up the unique assets of atomic layer deposition

David Muñoz‐Rojas, Tony Maindron, A. Estève et al. · Materials Today Chemistry · 2019 · 98 citations

Materials Science, Unique Assets, Engineering +5

Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 94 citations · Full text

Engineering, Thin Film Process Technology, Chemistry +17

Interface and plasma damage analysis of PEALD TaCN deposited on HfO2 for advanced CMOS studied by angle resolved XPS and C–V

Fabien Piallat, V. Beugin, R. Gassilloud et al. · Applied Surface Science · 2014 · 39 citations

Materials Science, Engineering, Bias Temperature Instability +5

Study of low temperature MOCVD deposition of TiN barrier layer for copper diffusion in high aspect ratio through silicon vias

Larissa Djomeni, Thierry Mourier, Stéphane Minoret et al. · Microelectronic Engineering · 2013 · 34 citations

Materials Science, Materials Engineering, Electrical Engineering +12

Investigation of TiN thin film oxidation depending on the substrate temperature at vacuum break

Fabien Piallat, R. Gassilloud, P. Caubet et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 29 citations

Engineering, Oxidation Resistance, Vacuum Device +17