Concepedia
Statistics
Publications
5
Citations
147
H-Index
Active since
2006
Affiliations
STMicroelectronics (France)(Current)
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
Laboratoire d'Électronique des Technologies de l'Information
Université Grenoble Alpes
Centre National de la Recherche Scientifique
P. Caubet is an author at STMicroelectronics (France) specializing in engineering, materials engineering, and materials science.
Top concepts
EngineeringMaterial ScienceMaterials EngineeringApplied PhysicsSurface ScienceThin FilmsMicroelectronicsChemical EngineeringElectrical EngineeringHydrogen
Publications per year
2006–2016
Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
P. Caubet, Tom Blomberg, R. Benaboud et al. · Journal of The Electrochemical Society · 2008 · 48 citations · Full text
Hydrogen Energy Technology, Engineering, Chemistry +19
Interface and plasma damage analysis of PEALD TaCN deposited on HfO2 for advanced CMOS studied by angle resolved XPS and C–V
Fabien Piallat, V. Beugin, R. Gassilloud et al. · Applied Surface Science · 2014 · 39 citations
Materials Science, Engineering, Bias Temperature Instability +5
Investigation of TiN thin film oxidation depending on the substrate temperature at vacuum break
Fabien Piallat, R. Gassilloud, P. Caubet et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 29 citations
Engineering, Oxidation Resistance, Vacuum Device +17
Investigating doping effects on high-κ metal gate stack for effective work function engineering
C. Leroux, S. Baudot, M. Charbonnier et al. · Solid-State Electronics · 2013 · 16 citations
Materials Engineering, Electrical Engineering, Engineering +5
Integration of a high density Ta2O5 MIM capacitor following 3D damascene architecture compatible with copper interconnects
M. Thomas, A. Farcy, Nicolas Gaillard et al. · Microelectronic Engineering · 2006 · 15 citations
Materials Engineering, Materials Science, Electrical Engineering +5
1–5 of 5