V. Beugin

14nm FDSOI technology for high speed and energy efficient applications

O. Weber, E. Josse, F. Andrieu et al. · 2014 · 89 citations

Low-power Electronics, Electrical Engineering, Engineering +9

3D Sequential Integration: Application-driven technological achievements and guidelines

P. Batude, Laurent Brunet, C. Fenouillet-Béranger et al. · 2017 · 73 citations

Contact Pitch, Engineering, 3D Modeling +26

Interface and plasma damage analysis of PEALD TaCN deposited on HfO2 for advanced CMOS studied by angle resolved XPS and C–V

Fabien Piallat, V. Beugin, R. Gassilloud et al. · Applied Surface Science · 2014 · 39 citations

Materials Science, Engineering, Bias Temperature Instability +5

Phase-Change Memory: Performance, Roles and Challenges

G. Navarro, G. Bourgeois, Julia Kluge et al. · 2018 · 24 citations

Engineering, Emerging Memory Technology, Computer Architecture +22

Dielectrics stability for intermediate BEOL in 3D sequential integration

Fabien Deprat, C. Fenouillet-Béranger, V. Jousseaume et al. · Microelectronic Engineering · 2016 · 13 citations

Dielectrics Stability, Engineering, Numerical Simulation +6