Publication | Closed Access
Defect evolution in AlN templates on PVD-AlN/sapphire substrates by thermal annealing
52
Citations
35
References
2018
Year
Materials EngineeringMaterials ScienceElectrical EngineeringAluminium NitrideEngineeringPhysicsSurface ScienceApplied PhysicsAln TemplatesAluminum Gallium NitrideDefect FormationDefects EvolutionDefect EvolutionDefect ToleranceThermal AnnealingCategoryiii-v Semiconductor
In this work, we studied the mechanism of defects evolution in AlN templates on PVD-AlN/sapphire substrates by thermal annealing.
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