Investigation of InAlN Layers Surface Reactivity after Thermal Annealings: A Complete XPS Study for HEMT

Yoan Bourlier, Muriel Bouttemy, O. Patard, Piero Gamarra, S. Piotrowicz, Jackie Vigneron, R. Aubry, S.L. Delage, Arnaud Etchéberry

ECS Journal of Solid State Science and Technology · 2018 · 104 citations · 72 references

DOIFull text

Open access

Concepts

Abstract

International audience

References

72