Preparation of MgO doped colloidal SiO2 abrasive and their chemical mechanical polishing performance on c-, r- and a-plane sapphire substrate - Concepedia

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Preparation of MgO doped colloidal SiO2 abrasive and their chemical mechanical polishing performance on c-, r- and a-plane sapphire substrate

71

Citations

27

References

2018

Year

Da Yin, Xinhuan Niu, Kai Zhang, Jianchao Wang, Yaqi Cui

Ceramics International

Materials ScienceMaterials EngineeringChemical EngineeringEngineeringCorrosionA-plane Sapphire SubstrateCeramic MaterialSurface ScienceMagnesium-based CompositeCeramic SynthesisColloidal Sio2 AbrasiveChemistry

References

	Year	Citations

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