Improving sidewall roughness by combined RIE-Bosch process

Handbook of Advanced Plasma Processing Techniques

J Shul, S L Pearton · Plasma Physics and Controlled Fusion · 2001 · 173 citations

Natural Sciences, Materials Engineering, Materials Science +17

Anisotropic Reactive Ion Etching of Silicon Using  SF 6 /  O 2 /  CHF 3 Gas Mixtures

R. Legtenberg, Henri Jansen, M. de Boer · Journal of The Electrochemical Society · 1995 · 161 citations · Full text

Engineering, Materials Engineering, Materials Science +14

Investigation of Silicon Nanowire Gate-All-Around Junctionless Transistors Built on a Bulk Substrate

Dong‐Il Moon, Sung‐Jin Choi, Juan Pablo Duarte et al. · IEEE Transactions on Electron Devices · 2013 · 134 citations

Engineering, Electrical Engineering, Materials Science +17

Fabrication and Characterization of Gate-All-Around Silicon Nanowires on Bulk Silicon

V. Pott, Kirsten E. Moselund, D. Bouvet et al. · IEEE Transactions on Nanotechnology · 2008 · 88 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

A global model for SF₆plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

George Kokkoris, Apostolos Panagiotopoulos, Andy Goodyear et al. · Journal of Physics D Applied Physics · 2009 · 79 citations

Natural Sciences, Physics, Chemical Kinetics +16