Concepedia

Andy Goodyear

AG

Statistics

Publications

13

Citations

518

H-Index

12

Active since

1995

Affiliations

Oxford Instruments (United Kingdom)(Current)

National Centre of Scientific Research "Demokritos"

Physikalisch-Technische Bundesanstalt

Andy Goodyear is an author at Oxford Instruments (United Kingdom) specializing in materials science, materials engineering, and natural sciences.

Publications per year

1995–2023

13

Publications

13

A global model for C<sub>4</sub>F<sub>8</sub>plasmas coupling gas phase and wall surface reaction kinetics

George Kokkoris, Andy Goodyear, Mike Cooke et al. · Journal of Physics D Applied Physics · 2008 · 111 citations

Natural Sciences, Chemistry, Physics +17

A global model for SF<sub>6</sub>plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

George Kokkoris, Apostolos Panagiotopoulos, Andy Goodyear et al. · Journal of Physics D Applied Physics · 2009 · 79 citations

Natural Sciences, Physics, Chemical Kinetics +16

Plasma directed assembly and organization: bottom-up nanopatterning using top-down technology

N. Vourdas, Dimitrios Kontziampasis, George Kokkoris et al. · Nanotechnology · 2010 · 56 citations

Natural Sciences, Materials Engineering, Materials Science +17

Silicon etch process options for micro- and nanotechnology using inductively coupled plasmas

Colin Welch, Andy Goodyear, T. Wahlbrink et al. · Microelectronic Engineering · 2006 · 53 citations

Engineering, Materials Engineering, Materials Science +12

Atomic layer etching of SiO<sub>2</sub> with Ar and CHF<sub>3</sub> plasmas: A self‐limiting process for aspect ratio independent etching

Stefano Dallorto, Andy Goodyear, Mike Cooke et al. · Plasma Processes and Polymers · 2019 · 47 citations · Full text

Engineering, Materials Engineering, Materials Science +17

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