Concepedia
Microelectronic Engineering · 2006 · 51 citations · 3 references
Materials ScienceEngineeringMicrofabricationNanotechnologyMaterials FabricationApplied PhysicsNonthermal PlasmaMicrofluidicsPlasma EtchingPlasma ProcessingPlasma ApplicationMicroelectronics
3
Critical tasks in high aspect ratio silicon dry etching for microelectromechanical systems
Ivo W. Rangelow · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 195 citations
Engineering, Electron-beam Lithography, Critical Tasks +18
Highly selective etch process for silicon-on-insulator nano-devices
T. Wahlbrink, T. Mollenhauer, Yordan M. Georgiev et al. · Microelectronic Engineering · 2004 · 34 citations
Electrical Engineering, Engineering, Nanoengineering +7
Fabrication of silicon nanopillars using self-organized gold–chromium mask
Victor Ovchinnikov, A. A. Malinin, C. Tuovinen · Materials Science and Engineering B · 2000 · 25 citations
Materials Science, Self-organized Gold–chromium Mask, Engineering +6