Yordan M. Georgiev

Study of a high contrast process for hydrogen silsesquioxane as a negative tone electron beam resist

W. Henschel, Yordan M. Georgiev, H. Kurz · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 151 citations

Engineering, Materials Engineering, Materials Science +13

Aligned silicon nanofins <i>via</i> the directed self-assembly of PS-<i>b</i>-P4VP block copolymer and metal oxide enhanced pattern transfer

Cian Cummins, Anushka Gangnaik, Róisín A. Kelly et al. · Nanoscale · 2015 · 62 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

Junctionless silicon nanowire transistors for the tunable operation of a highly sensitive, low power sensor

Elizabeth Buitrago, Giorgos Fagas, Montserrat Fernández-Bolaños Badía et al. · Sensors and Actuators B Chemical · 2013 · 54 citations · Full text

Engineering, Electrical Engineering, Materials Science +16

Organo-arsenic Molecular Layers on Silicon for High-Density Doping

John O’Connell, Giuseppe Alessio Verni, Anushka Gangnaik et al. · ACS Applied Materials & Interfaces · 2015 · 39 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Characterisation of a novel electron beam lithography resist, SML and its comparison to PMMA and ZEP resists

Anushka Gangnaik, Yordan M. Georgiev, Brendan McCarthy et al. · Microelectronic Engineering · 2014 · 35 citations · Full text

Engineering, Materials Engineering, Materials Science +8