W. Henschel

Ultrahigh-quality-factor silicon-on-insulator microring resonator

J. Niehusmann, A. Vörckel, P. Haring Bolívar et al. · Optics Letters · 2004 · 286 citations

Engineering, Electrical Engineering, Materials Science +16

Study of a high contrast process for hydrogen silsesquioxane as a negative tone electron beam resist

W. Henschel, Yordan M. Georgiev, H. Kurz · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 151 citations

Engineering, Materials Engineering, Materials Science +13

Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers

A. Vörckel, M. Monster, W. Henschel et al. · IEEE Photonics Technology Letters · 2003 · 124 citations

Engineering, Electrical Engineering, Optical Materials +16

Sub-10 nm Linewidth and Overlay Performance Achieved with a Fine-Tuned EBPG-5000 TFE Electron Beam Lithography System

Bernd E. Maile Bernd E. Maile, W. Henschel, H. Kurz et al. · Japanese Journal of Applied Physics · 2000 · 77 citations

Engineering, Materials Science, Microelectronics +9

Large scale ultraviolet-based nanoimprint lithography

B. Vratzov, Andreas Fuchs, Max C. Lemme et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 71 citations

Engineering, Electrical Engineering, Materials Science +14