Concepedia

Stefano Dallorto

SD

4

Publications

321

Citations

4

H-Index

2014

Active since

Affiliations

Lawrence Berkeley National Laboratory(Current)

Technische Universität Ilmenau

Stefano Dallorto is an author at Lawrence Berkeley National Laboratory specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsNanotechnologySemiconductorsNanoelectronicsNanofabricationNanolithographySurface Science

Publications per year

2014–2019

4

Publications

4

Optimization of 1D ZnO@TiO<sub>2</sub>Core–Shell Nanostructures for Enhanced Photoelectrochemical Water Splitting under Solar Light Illumination

Simelys Hernández, Valentina Cauda, Angelica Chiodoni et al. · ACS Applied Materials & Interfaces · 2014 · 212 citations

Atomic layer etching of SiO<sub>2</sub> with Ar and CHF<sub>3</sub> plasmas: A self‐limiting process for aspect ratio independent etching

Stefano Dallorto, Andy Goodyear, Mike Cooke et al. · Plasma Processes and Polymers · 2019 · 44 citations · Full text

Engineering, Pattern Transfer, Atomic Layer Etching +16

Pattern-generation and pattern-transfer for single-digit nano devices

Ivo W. Rangelow, Ahmad Ahmad, Tzvetan Ivanov et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 42 citations · Full text

Engineering, Electron-beam Lithography, Pattern Transfer +20

Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features

Stefano Dallorto, Daniel Staaks, Adam Schwartzberg et al. · Nanotechnology · 2018 · 23 citations · Full text

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