4
Publications
88
Citations
4
H-Index
2016
Active since
Daniel Staaks is an author at Lawrence Berkeley National Laboratory specializing in nanofabrication, integrated circuits, and optoelectronic devices.
Top concepts
EngineeringNanotechnologySemiconductorsApplied PhysicsNanoelectronicsNanofabricationNanolithographyMaterial ScienceElectronic DevicesIntegrated Circuits
Publications per year
2016–2019
4
4
Pattern-generation and pattern-transfer for single-digit nano devices
Ivo W. Rangelow, Ahmad Ahmad, Tzvetan Ivanov et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 42 citations · Full text
Engineering, Electron-beam Lithography, Pattern Transfer +20
Low temperature dry etching of chromium towards control at sub-5 nm dimensions
Daniel Staaks, XiaoMin Yang, Kim Y. Lee et al. · Nanotechnology · 2016 · 13 citations
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