Concepedia

Publication | Closed Access

Influence of Si wafer thinning processes on (sub)surface defects

DOI

36

Citations

23

References

2017

Year

Fumihiro Inoue, Anne Jourdain, Lan Peng, Alain Phommahaxay, Joeri De Vos, Kenneth June Rebibis, Andy Miller, Erik Sleeckx, Eric Beyne, Akira Uedono
Applied Surface Science

References

YearCitations

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