Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge(100) prepared by PEALD - Concepedia

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Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge(100) prepared by PEALD

20

Citations

19

References

2016

Year

Vijay S. Patil, Khushabu Agrawal, Anil G. Khairnar, B.J. Thibeault, Ashok M. Mahajan

Materials Science in Semiconductor Processing

Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsSemiconductor MaterialElectrical Properties

References

	Year	Citations

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