Concepedia

Anil G. Khairnar

AG

9

Publications

310

Citations

9

H-Index

2011

Active since

Affiliations

North Maharashtra University(Current)

University of California, Santa Barbara

Anil G. Khairnar is an author at North Maharashtra University specializing in engineering, applied physics, and materials science.

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Publications per year

2011–2017

9

Publications

9

Structural and electrical characteristics of RF-sputtered HfO2 high-k based MOS capacitors

Pravin M. Tirmali, Anil G. Khairnar, Bhavana Joshi et al. · Solid-State Electronics · 2011 · 84 citations

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Effect of post-deposition annealing temperature on RF-sputtered HfO2 thin film for advanced CMOS technology

Anil G. Khairnar, Ashok M. Mahajan · Solid State Sciences · 2012 · 76 citations

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Sol–gel deposited ceria thin films as gate dielectric for CMOS technology

Anil G. Khairnar, Ashok M. Mahajan · Bulletin of Materials Science · 2013 · 33 citations

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Electrical properties of MOS capacitors formed by PEALD grown Al2O3 on silicon

Ashok M. Mahajan, Anil G. Khairnar, B.J. Thibeault · Semiconductors · 2014 · 28 citations

High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates

Ashok M. Mahajan, Anil G. Khairnar, B.J. Thibeault · Silicon · 2015 · 22 citations

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