Applied Surface Science · 2016 · 29 citations · 12 references
EngineeringBiomedical EngineeringMechanical EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationMems ActuatorsMems DesignMems SwitchesMicrofabrication ProcessesMicromachiningSurface MicromachiningMicroactuatorsMicroelectromechanical ActuatorsMicroelectromechanical SwitchesMicroelectromechanical Systems (Mems) Compliant MechanismsMicromachined Switch DesignMicroswitchesSurface Micromachined ActuatorsSurface Micromachining Actuators
12
Sven Michaelis, H.‐J. Timme, Michael Wycisk et al. · Journal of Micromechanics and Microengineering · 2000 · 104 citations
Engineering, Electrical Engineering, Manufacturing Engineering +17