A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time

Qiu Xu, Zhuoqing Yang, Bo Fu, Jianhua Li, Hao Wu, Qihuan Zhang, Yunna Sun, Guifu Ding, Xiaolin Zhao

Applied Surface Science · 2016 · 29 citations · 12 references

Concepts

References

12