H.‐J. Timme

Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applications

Sven Michaelis, H.‐J. Timme, Michael Wycisk et al. · Journal of Micromechanics and Microengineering · 2000 · 104 citations

Engineering, Transportation Applications, Wearable Technology +19

Advancement of MEMS into RF-filter applications

Robert Aigner, J. Ellä, H.‐J. Timme et al. · 2003 · 77 citations

Electrical Engineering, Engineering, Radio Frequency Micro-electromechanical Systems +10

Low-cost post-CMOS integration of electroplated microstructures for inertial sensing

Michael Wycisk, Thorsten Tonnesen, J. Binder et al. · Sensors and Actuators A Physical · 2000 · 63 citations

Electrical Engineering, Engineering, Microfabrication +7

Full integration of a pressure-sensor system into a standard BiCMOS process

T. Scheiter, H. Kapels, K.-G. Oppermann et al. · Sensors and Actuators A Physical · 1998 · 42 citations

Engineering, Sensors, Standard Bicmos Process +9

A low-voltage torsional actuator for application in RF-microswitches

Florian Plötz, Sven Michaelis, Robert Aigner et al. · Sensors and Actuators A Physical · 2001 · 38 citations

Electrical Engineering, Engineering, Microfabrication +7