Fracture strength and fatigue of polysilicon determined by a novel thermal actuator [MEMS]

H. Kapels, Robert Aigner, J. Binder

IEEE Transactions on Electron Devices

EngineeringMechanical EngineeringNovel Thermal ActuatorMicro-electromechanical SystemMechanics +14

Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applications

Sven Michaelis, H.‐J. Timme, Michael Wycisk, +1

Journal of Micromechanics and Microengineering

EngineeringTransportation ApplicationsWearable TechnologyMems Acceleration-threshold SwitchesLow Cost Sensor +17

Advanced hybrid integrated low-power telemetric pressure monitoring system for biomedical applications

T. Eggers, Claudia Marschner, Uwe Marschner, +3

Medical ElectronicsEngineeringWearable TechnologySensor InterfaceBiomedical Engineering +16

Low-cost post-CMOS integration of electroplated microstructures for inertial sensing

Michael Wycisk, Thorsten Tonnesen, J. Binder, +2

Sensors and Actuators A Physical

Electrical EngineeringEngineeringMicrofabricationMechanical EngineeringNano Electro Mechanical System +5

Simulation, design and fabrication of electroplated acceleration switches

O. Lüdtke, J. Noetzel, J. Binder, +1

Journal of Micromechanics and Microengineering

EngineeringMechanical EngineeringAcceleration SwitchesMicroactuatorPower Electronics +18

Comparison of stress measurement techniques in surface micromachining

L. Elbrecht, U. Storm, R. Catanescu, +1

Journal of Micromechanics and Microengineering

Materials ScienceEngineeringMicromachinesMicrofabricationMechanics +10

A low-voltage torsional actuator for application in RF-microswitches

Florian Plötz, Sven Michaelis, Robert Aigner, +3

Sensors and Actuators A Physical

Electrical EngineeringEngineeringMicrofabricationMechatronicsMechanical Systems +5

Ordered Growth of Substituted Phthalocyanine Thin Films:  Hexadecafluorophthalocyaninatozinc on Alkali Halide (100) and Microstructured Si Surfaces

Derck Schlettwein, Kolja Hesse, Hirokazu Tada, +3

Chemistry of Materials

EngineeringOrganic ElectronicsThin Film Process TechnologyChemistryAlkali Halide +14

Fluid characterization using sensor elements based on interdigitated electrodes

Thomas Hofmann, Kai‐Uwe Schröder, J. Zacheja, +1

Sensors and Actuators B Chemical

Electrical EngineeringEngineeringSensor DesignElectroanalytical SensorInstrumentation +3

Acceleration threshold switches from an additive electroplating MEMS process

Sven Michaelis, Hans-Joerg Timme, Michael Wycisk, +1

Sensors and Actuators A Physical

Electrical EngineeringEngineeringMicrofabricationNano Electro Mechanical SystemInstrumentation +2