Simulation, design and fabrication of electroplated acceleration switches

Abstract

This paper describes the simulation, design and fabrication of acceleration switches for automotive applications. A simulation model is introduced which describes the dynamical behaviour of the sensor. The main focus of the development is on the specifications of the accelerometer, such as the switching time, the overload protection, the self-test feature and the damping behaviour. The simulated acceleration switches are fabricated with the use of a sacrificial layer technique and electroplated moulding of microforms. The 3D-UV Microform technology was preferred because it enables high aspect ratio patterning of commercially available thick photoresists. First devices of the microswitch sensors were characterized by means of optical measurement facilities for the determination of resonance frequencies and of the dynamical behaviour during test pulses. Measurements on a shaker were carried out to confirm the validity of the model.