Low-cost post-CMOS integration of electroplated microstructures for inertial sensing

Simulation, design and fabrication of electroplated acceleration switches

O. Lüdtke, J. Noetzel, J. Binder et al. · Journal of Micromechanics and Microengineering · 1997 · 52 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Galvanoplating and sacrificial layers for surface micromachining

B. Lo ̈chel, Hans-Joachim Quenzer, B. Wagner et al. · Microelectronic Engineering · 1995 · 37 citations

Engineering, Materials Engineering, Materials Science +14

Characterization of anhydrous HF gas-phase etching with CH3OH for sacrificial oxide removal

Jong‐Hyun Lee, Won Ick Jang, Chang Seung Lee et al. · Sensors and Actuators A Physical · 1998 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +13

Dry release of metal structures in oxygen plasma: process characterization and optimization

M. Bartek, R.F. Wolffenbuttel · Journal of Micromechanics and Microengineering · 1998 · 30 citations

Engineering, Materials Engineering, Materials Science +17

<title>New sensor-on-chip technology for micromechanical acceleration-threshold switches</title>

Michael Wycisk, J. Binder, Sven Michaelis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 10 citations

Engineering, Electrical Engineering, Mechanical Engineering +17