Publication | Closed Access
Low-cost post-CMOS integration of electroplated microstructures for inertial sensing
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Citations
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References
2000
Year
Electrical EngineeringEngineeringMicrofabricationMechanical EngineeringNano Electro Mechanical SystemInstrumentationMicroelectronicsSensor TechnologyMicro-electromechanical SystemInertial Sensing
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