A low-voltage torsional actuator for application in RF-microswitches - Concepedia

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A low-voltage torsional actuator for application in RF-microswitches

38

Citations

6

References

2001

Year

Florian Plötz, Sven Michaelis, Robert Aigner, H.‐J. Timme, J. Binder, R. Noé

Sensors and Actuators A Physical

Electrical EngineeringEngineeringMicrofabricationMechatronicsMechanical SystemsLow-voltage Torsional ActuatorActuationMicroactuatorMicroelectronicsMicro-electromechanical System

References

	Year	Citations

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