Concepedia

Full integration of a pressure-sensor system into a standard BiCMOS process

T. Scheiter, H. Kapels, K.-G. Oppermann, M. Steger, Christofer Hierold, W. Werner, H.‐J. Timme

Sensors and Actuators A Physical · 1998 · 42 citations · 2 references

Concepts

EngineeringMechanical EngineeringSystems EngineeringInstrumentationSensorsMems SensorsPressure MeasurementPressure SensorsSensor IntegrationSensor InterfacingSystems IntegrationBicmos TechnologyPressure Measurement SystemsPressure Sensing SystemsPressure Sensor InterfacingPressure Signal ConditioningSige Bicmos Design

References

2

Surface micromachined pressure sensors with integrated CMOS read-out electronics

H. Dudaicevs, M. Kandler, Yiannos Manoli et al. · Sensors and Actuators A Physical · 1994 · 90 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

Polysilicon Integrated Microsystems: Technologies And Applications

Roger T. Howe · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 41 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16