Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 41 citations · 9 references
EngineeringElectrical EngineeringMicroelectromechanical SystemsMicroelectronicsSemiconductor DevicesCmos Circuit DesignIntegrated Circuit DesignMems DesignMems SensorsMicroelectromechanical SensorsNoise In Electronic DevicesAccelerometer SensorsCmos OscillatorsInertial SensingLow-power Signal ProcessingMicromechanical OscillatorsMonolithic ArchitecturePolysiliconPolysilicon Processing
Merging polysilicon microstructures with CMOs electronics offers monolithic solutions for inertial sensing and micromechanical signal processing. Correlations between polysilicon deposition, doping, and anneal conditions and the mechanical properties are understood. A low-thermal impact polysilicon process could be merged with submicron CMOS. In vacuum, the Brownian noise of a polysilicon accelerometer is about 1 /spl mu/g/Hz/sup 1/2/. An integrated sigma-delta controller, implemented in 1 /spl mu/m CMOS, can in principle resolve this noise. Microresonator oscillators and filters are of potential application in low-power electronic signal processing. Building-block approaches to microsystem design are emerging.
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