Concepedia

Surface Micromachining Actuators

Surface Micromachining Actuator is a microfabricated electrostatic actuator constructed through the deposition and patterning of thin films on a substrate surface, distinguished from bulk micromachined actuators by its layer-by-layer additive manufacturing process that enables planar integration with electronic circuits.

108

Publications

4.8K

Citations

291

Authors

85

Institutions

Publications per year

2017–2026

4

Parents

Publications

108

Modeling and optimal design of piezoelectric cantilever microactuators

Don L. DeVoe, Albert P. Pisano · Journal of Microelectromechanical Systems · 1997 · 350 citations

, , +16

Applications for surface-micromachined polysilicon thermal actuators and arrays

John H. Comtois, Victor M. Bright · Sensors and Actuators A Physical · 1997 · 206 citations

, , +12

Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS

Takeo Akiyama, Dominique Collard, Hiroyuki Fujita · Journal of Microelectromechanical Systems · 1997 · 197 citations

, , +16

Flexible mirror micromachined in silicon

Gleb Vdovin, P.M. Sarro · Applied Optics · 1995 · 176 citations

, , +16

Electromechanically tunable metasurface transmission waveplate at terahertz frequencies

Xiaoguang Zhao, Jacob Schalch, Jingdi Zhang et al. · Optica · 2018 · 170 citations · Full text

, , +17

1–5 of 108

Authors

291

  1. RM
    R.S. Muller

    University of California, Berkeley, United States

    7 publications · 324 citations

    7

    h-index

  2. MC
    Ming C. Wu

    University of California, Berkeley, United States

    7 publications · 275 citations

    7

    h-index

  3. SH
    Siyuan He

    Toronto Metropolitan University, Canada

    6 publications · 215 citations

    6

    h-index

  4. JS
    J.J. Sniegowski

    Sandia National Laboratories, United States

    5 publications · 225 citations

    5

    h-index

  5. JH
    John H. Comtois

    U.S. Air Force Institute of Technology, United States

    5 publications · 403 citations

    5

    h-index

1–5 of 291

Institutions

85

  1. University of California, Berkeley

    Berkeley, United States

    10 h-index

    38 publications

    2.3K citations

  2. Sandia National Laboratories

    Albuquerque, United States

    8 h-index

    24 publications

    1.7K citations

  3. University of California, Los Angeles

    Los Angeles, United States

    7 h-index

    18 publications

    525 citations

  4. Sandia National Laboratories California

    Livermore, United States

    7 h-index

    20 publications

    763 citations

  5. Toronto Metropolitan University

    Toronto, Canada

    6 h-index

    10 publications

    314 citations

  6. Case Western Reserve University

    Cleveland, United States

    5 h-index

    13 publications

    549 citations

  7. Electronics and Telecommunications Research Institute

    Daejeon, South Korea

    4 h-index

    12 publications

    194 citations

  8. University of Michigan

    Ann Arbor, United States

    4 h-index

    5 publications

    271 citations

1–8 of 85

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 17 publications · 589 citations

    14

    h-index

  2. Journal of Microelectromechanical Systems

    14 publications · 1.4K citations

    13

    h-index

  3. 10

    h-index

  4. Sensors and Actuators A Physical

    5 publications · 342 citations

    5

    h-index

  5. IEEE Photonics Technology Letters

    IPTEL · 4 publications · 156 citations

    4

    h-index

1–5