John H. Comtois

Applications for surface-micromachined polysilicon thermal actuators and arrays

John H. Comtois, Victor M. Bright · Sensors and Actuators A Physical · 1997 · 206 citations

Engineering, Micromachines, Microfabrication +4

Thermal microactuators for surface-micromachining processes

John H. Comtois, Victor M. Bright, Mark W. Phipps · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 91 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +20

Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon

John H. Comtois, M. Adrian Michalicek, C.C. Barron · Sensors and Actuators A Physical · 1998 · 70 citations

Materials Science, Engineering, Soft Robotics +10

Characterization of electrothermal actuators and arrays fabricated in a four-level, planarized surface-micromachined polycrystalline silicon process

John H. Comtois, M. Adrian Michalicek, C.C. Barron · 2002 · 45 citations

Engineering, Mechanical Engineering, Electrothermal Microactuators +17

<title>Force measurements of polysilicon thermal microactuators</title>

J.R. Reid, Victor M. Bright, John H. Comtois · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 38 citations

Force Testers, Engineering, Measurement +17