M. Adrian Michalicek

Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon

John H. Comtois, M. Adrian Michalicek, C.C. Barron · Sensors and Actuators A Physical · 1998 · 70 citations

Materials Science, Engineering, Soft Robotics +10

Characterization of electrothermal actuators and arrays fabricated in a four-level, planarized surface-micromachined polycrystalline silicon process

John H. Comtois, M. Adrian Michalicek, C.C. Barron · 2002 · 45 citations

Engineering, Mechanical Engineering, Electrothermal Microactuators +17

Digitally controllable variable high-Q MEMS capacitor for RF applications

M. Adrian Michalicek, Y.C. Lee, K.C. Gupta et al. · 2002 · 37 citations

Electrical Engineering, Rf Applications, Engineering +13

Flip-chip fabrication of advanced micromirror arrays

M. Adrian Michalicek, Victor M. Bright · Sensors and Actuators A Physical · 2002 · 34 citations

Wafer Scale Processing, Engineering, Microfabrication +6

Advanced Modeling of Micromirror Devices

M. Adrian Michalicek, Darren E. Sene, Victor M. Bright · SPIE milestone series · 1995 · 25 citations

Square Fbmd, Engineering, Optic Design +17