Evaluation of Polishing-Induced Subsurface Damage of 4H-SiC (0001) by Cross-Sectional Electron Backscattered Diffraction and Synchrotron X-Ray Micro-Diffraction

Electron backscatter diffraction and electron channeling contrast imaging of tilt and dislocations in nitride thin films

C. Trager‐Cowan, F. Sweeney, Patrick Trimby et al. · Physical Review B · 2007 · 75 citations

Natural Sciences, Materials Engineering, Materials Science +16

Elastic strain tensor measurement using electron backscatter diffraction in the SEM

D. J. Dingley, A.J. Wilkinson, Graham Meaden et al. · Journal of Electron Microscopy · 2010 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +17

Assessment of Polishing-Related Surface Damage in Silicon Carbide

Edward Sanchez, S. Ha, J.R. Grim et al. · Journal of The Electrochemical Society · 2002 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +16

Microstructural Analysis of Damaged Layer Introduced during Chemo-Mechanical Polishing

Hideki Sako, Tamotsu Yamashita, Kentaro Tamura et al. · Materials science forum · 2014 · 26 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

High-Angular-Resolution Microbeam X-Ray Diffraction with CCD Detector

Yasuhiko Imai, Shigeru Kimura, Osami Sakata et al. · AIP conference proceedings · 2010 · 24 citations

Natural Sciences, Materials Science, Physics +14