Hideki Sako

Growth kinetics and thermal stability of a self-formed barrier layer at Cu-Mn∕SiO2 interface

Junichi Koike, M. Haneda, Jun Iijima et al. · Journal of Applied Physics · 2007 · 98 citations

Engineering, Thin Film Process Technology, Chemical Deposition +17

Relation between Defects on 4H-SiC Epitaxial Surface and Gate Oxide Reliability

Junichiro Sameshima, Osamu Ishiyama, Atsushi Shimozato et al. · Materials science forum · 2013 · 52 citations

Semiconductor Technology, 4H-sic Epitaxial Surface, Electrical Engineering +11

Graded composition and valence states in self-forming barrier layers at Cu–Mn/SiO2 interface

Yuji Otsuka, Junichi Koike, Hideki Sako et al. · Applied Physics Letters · 2010 · 46 citations

Materials Science, Self-forming Diffusion Barrier, Cu–mn/sio2 Interface +13

Growth and Characterization of Lanthanum Calcium Oxoborate LaCa₄O(BO₃)₃Single Crystals

Hiroaki Takeda, Hideki Sako, Hiroyuki Shimizu et al. · Japanese Journal of Applied Physics · 2003 · 36 citations

Materials Science, Surface Acoustic Wave, Engineering +12

Micro-structural analysis of local damage introduced in subsurface regions of 4H-SiC wafers during chemo-mechanical polishing

Hideki Sako, Hirofumi Matsuhata, Masayuki Sasaki et al. · Journal of Applied Physics · 2016 · 34 citations

Engineering, Mechanical Engineering, Lattice Defect +17