J.R. Grim

Transmission electron microscopy analysis of mechanical polishing-related damage in silicon carbide wafers

J.R. Grim, Mourad Benamara, Marek Skowroński et al. · Semiconductor Science and Technology · 2006 · 42 citations

Engineering, Severe Plastic Deformation, Mechanical Engineering +21

Assessment of Polishing-Related Surface Damage in Silicon Carbide

Edward Sanchez, S. Ha, J.R. Grim et al. · Journal of The Electrochemical Society · 2002 · 34 citations

Engineering, Mechanical Engineering, Surface Integrity +19

Quantitative study of interface roughness replication in multilayers using x-ray reflectivity and transmission electron microscopy

M. Chládek, V. Valvoda, Carola Dorner et al. · Applied Physics Letters · 1996 · 20 citations

Interface Roughness Replication, Engineering, Transmission Electron Microscopy +18

Quantum well behavior of single stacking fault 3C inclusions in 4H-SiC p-i-n diodes studied by ballistic electron emission microscopy

Kibog Park, J. P. Pelz, J.R. Grim et al. · Applied Physics Letters · 2005 · 19 citations

Categoryquantum Electronics, Engineering, Semiconductor Device +18