MRS Proceedings · 1989 · 27 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationSemiconductor MaterialsThin FilmsDopingElectronic Material CharacterizationRare-earth-doped MaterialsSemiconductor Device MaterialsSemiconductor PhysicsSemiconductor Thin FilmsDoped SemiconductorsDoping In Thin FilmsRare-earth-doped Thin FilmsSemiconductor ConductivitySilicon DopingSilicon NitrideSilicon Thin Films
9
Influence of plasma excitation frequency fora-Si:H thin film deposition
H. Curtins, N. Wyrsch, M. Favre et al. · Plasma Chemistry and Plasma Processing · 1987 · 170 citations
Amorphous Semiconductor Technologies and Devices
WI Milne · Electronics and Power · 1982 · 104 citations
Natural Sciences, Electrical Engineering, Materials Science +12
Novel effects of magnetic field on the silane glow discharge
M. Taniguchi, M. Hirose, Toshihiko Hamasaki et al. · Applied Physics Letters · 1980 · 59 citations