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Preparation and Characterization of Highly Conductive (100 S/cm) Phosphorus Doped νc-Si:H Films Deposited Using the VHF-GD Technique

Materials ScienceEngineeringElectronic MaterialsApplied PhysicsVhf-gd TechniqueH Films DepositedHighly ConductiveOptoelectronic DevicesSemiconductor MaterialThin FilmsSilicon On Insulator