Single crystal diamond wafers for high power electronics

Abstract

According to international energy proposal, about 25% of the total CO2 reduction should come from “end use efficiency”. Hence, low loss power devices are an important technology for the 21st century. Diamond-based devices have the potential, but this would require fast development in order to contribute to the CO2 reduction plan early in this century. Here, we present a clear target for the R&D of diamond wafer. According to the expected applications of diamond devices with a vertical structure, the required target properties for first stage diamond wafers are; a killer defect density less than 0.1 cm− 2, resistivity less than 0.005 Ω cm and a size of 4 in. For the final commercialization stage, targets of zero killer defects, resistivity of 0.001 Ω cm and a size of 6 in. are proposed. The challenges and proposal solutions are reviewed for each technology.