Quasianalog accelerometer using microswitch array

A surface micromachined silicon accelerometer with on-chip detection circuitry

Wolfgang Kuehnel, Steven Sherman · Sensors and Actuators A Physical · 1994 · 232 citations

Engineering, Electrical Engineering, Mechatronics Engineering +14

Microelectromechanical systems

Mehran Mehregany · IEEE Circuits and Devices Magazine · 1993 · 57 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +11

Fabrication of high depth-to-width aspect ratio microstructures

G. Engelmann, O. Ehrmann, J. Simon et al. · 1992 · 55 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fabrication and characterization of silicon micromachined threshold accelerometers

Graham McKinnon, Michael J. Brett · Sensors and Actuators A Physical · 1991 · 42 citations

Engineering, Electrical Engineering, Mechanical Engineering +12

Galvanoplating and sacrificial layers for surface micromachining

B. Lo ̈chel, Hans-Joachim Quenzer, B. Wagner et al. · Microelectronic Engineering · 1995 · 37 citations

Engineering, Materials Engineering, Materials Science +14