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Microstructured silicon membrane with soft suspension beams for a high performance MEMS microspeaker

EngineeringSoft Suspension BeamsMicrofabricationMechanical EngineeringMicromachined Ultrasonic TransducerMicroelectromechanical SystemsBiomedical EngineeringMicroactuatorSoft MatterMicroelectronicsMicro-electromechanical SystemMicrofluidics