Concepedia

S. Megherbi

SM

Statistics

Publications

6

Citations

116

H-Index

6

Active since

2006

Affiliations

Centre National de la Recherche Scientifique(Current)

Université Paris-Sud

S. Megherbi is an author at Centre National de la Recherche Scientifique specializing in microfabrication, engineering, and mechanical engineering.

Top concepts

Publications per year

2006–2013

6

Publications

6

Two- and three-dimensional microcoil fabrication process for three-axis magnetic sensors on flexible substrates

M. Woytasik, J.P. Grandchamp, Elisabeth Dufour‐Gergam et al. · Sensors and Actuators A Physical · 2006 · 32 citations

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A low-cost built-in self-test method for thermally actuated resistive MEMS sensors

O. Legendre, Hervé Bertin, H. Mathias et al. · Sensors and Actuators A Physical · 2013 · 24 citations

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Fabrication of planar and three-dimensional microcoils on flexible substrates

M. Woytasik, J.P. Grandchamp, Elisabeth Dufour‐Gergam et al. · Microsystem Technologies · 2006 · 23 citations

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Microstructured silicon membrane with soft suspension beams for a high performance MEMS microspeaker

Iman Shahosseini, Élie Lefeuvre, Emile Martincic et al. · Microsystem Technologies · 2012 · 17 citations

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In-plane vibration measurement of microdevices by the knife-edge technique in reflection mode

Alain Bosseboeuf, Cédric Breluzeau, Fabien Parrain et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 10 citations

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