Cédric Breluzeau

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Active since

2006

Affiliations

Centre National de la Recherche Scientifique(Current)

Université Paris-Sud

Cédric Breluzeau is an author at Centre National de la Recherche Scientifique specializing in applied physics, microfabrication, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMicrofabricationPhysicsPhotonicsVibrationMicroscopyMicrofluidicsMicrostructure

Publications per year

2006–2007

Publications

Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor

Baptiste Le Foulgoc, Tarik Bourouina, O. Le Traon et al. · Journal of Micromechanics and Microengineering · 2006 · 53 citations

Optical Materials, Engineering, Mechanical Engineering +18

Vacuum measurement in wafer level encapsulations by interference microscopy

Alain Bosseboeuf, J.P. Grandchamp, Cédric Breluzeau et al. · Microsystem Technologies · 2006 · 16 citations

Wafer Scale Processing, Engineering, Microscopy +7

Fabrication of free-standing porous silicon microstructures

Olivier Garel, Cédric Breluzeau, Elisabeth Dufour‐Gergam et al. · Journal of Micromechanics and Microengineering · 2007 · 14 citations

Materials Science, High Specific Surface, Chemical Engineering +13

In-plane vibration measurement of microdevices by the knife-edge technique in reflection mode

Alain Bosseboeuf, Cédric Breluzeau, Fabien Parrain et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 10 citations

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